Description
This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.
Product Details
- Published:
- 01/01/2007
- ISBN(s):
- 9780978786816
- Number of Pages:
- 62
- File Size:
- 1 file , 1.9 MB
