Description
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
Product Details
- Published:
- 01/01/2000
- Number of Pages:
- 9
- File Size:
- 1 file , 280 KB
Genuine ANSI, AS, BS, AWS Standards
All Codes In PDF Versions
$27.60
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry
standard by ASTM International, 01/01/2000
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry