Description
This RP reviews factors to consider in the design of cleanroom facilities, provides a framework to establish performance criteria, and includes details on specific processes and systems. A new section on energy efficiency helps users evaluate initial costs and life-cycle costs and includes a table of energy-conserving steps. The document also covers contamination control procedures for the construction phase.
Product Details
- Edition:
- 9781937280178
- Published:
- 02/01/2015
- ISBN(s):
- 9781937280178, 9781937280161
- Number of Pages:
- 84
- File Size:
- 1 file , 1.8 MB
- Redline File Size:
- 2files, 9.1 MB
